Electron Probe MicroAnalysis Quantitative analysis and latest development at CAMECA

Anna Bui, Mona P. Moret, Anne-Sophie Robbes, Carl Henderson,

CAMECA, 29 quai des Grésillons 92622 Gennevilliers Cedex


CAMECA leader in scientific instruments has been manufacturing Electron Microprobe (EPMA) since 1958. An introduction on the history of CAMECA from the 1958 to today’s SXFiveTactis will be presented.

Thanks to its precision, its reproducibility and its stability, Electron Microprobe is a well suited technique for accurately analyzing nearly all chemical elements at concentration levels down to few 10’s ppm with a spatial resolution of about 1 µm, which is relevant to microstructures in a wide variety of materials and mineral specimens. The main output of an EPMA analysis is the elemental distribution across the surface as shown in the mappings below:



High-resolution X-ray maps of copper (Cu), zinc

(Zn) and silver (Ag) illustrating the interdiffusion zone between the

main material (Cu) and the brazing material (Ag-Zn)


The basics of the CAMECA EPMA will be reviewed. Typical EPMA SXFiveTACTIS outputs will be presented in geoscience, metallurgy and materials science. Specific examples dedicated to light elements quantification such as Li and Nitrogen will be reviewed.

Afin de mieux préparer la séance,  les participants de cet atelier doivent télécharger les documents disponibles sur le site suivant : https://www.cameca.com/company/news/2018/july/epma-ekb-tutorial-2nd-edition



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